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Volumn 155, Issue 9, 2008, Pages

Characterization of threading dislocations in thin germanium layers by defect etching: Toward chromium and HF-free solution

a IMEC (Belgium)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; CRYSTALLINE MATERIALS; ETCHING; GERMANIUM; HYDROFLUORIC ACID;

DEFECT ETCHING; ETCH RATES; FREE SOLUTIONS; HIGH SELECTIVITY; SINGLE-CRYSTALLINE; THIN LAYERING; THREADING DISLOCATIONS;

SOLUTIONS;

EID: 49149131360 PISSN: 00134651 EISSN: None Source Type: Journal
DOI: 10.1149/1.2953495 Document Type: Article

Times cited : (21)

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