Characterization of thin metal films with overlayers by transparency and multiangle including surface plasmon excitation reflectance ellipsometry method

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3094, Issue , 1997, Pages 250-254

  Borkovskaya, Olga Yu ^a   Dmitruk, Nikolas L ^a   Fursenko, Oksana V ^a  

^a INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

Ag; Au; Corrosion; Ellipsometry; GaAs; InP; Intrinsic oxide; Surface plasmons; Thin films; Transparency

Indexed keywords

CORROSION; ELLIPSOMETRY; GALLIUM ALLOYS; GOLD; METALLIC FILMS; OPTICAL CONSTANTS; OPTICAL DATA STORAGE; OXIDE FILMS; OXIDE MINERALS; PLASMONS; POLARIMETERS; QUARTZ; REFLECTION; SEMICONDUCTING GALLIUM; THIN FILMS; TRANSPARENCY;

AG; AU; GAAS; INP; INTRINSIC OXIDE; SURFACE PLASMONS;

SILVER;

EID: 49149105868     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.271822     Document Type: Conference Paper

References (7)

1. N.L.Dmitruk, O.V.Fursenko, O.Yu.Borkovskaya, "Optical properties of the optoelectronic structures metal-semiconductor with tunnel-thin transitional dielectric layer", Optoelektron. Poluprovodn. Tekh.(Kiev) 27, 115-121 (1994).
2. N.L.Dmitruk, O.Yu.Borkovskaya, O.I.Mayeva and O.V.Fursenko "Polarization-sensitive photocurrents of metal-semiconductor structures with flat and microrelief interfaces", Microelectr. Journ. 27(1), 37-42 (1996).
3. F.Abeles, "Surface electromagnetic waves ellipsometry", Surf. Science 56(1), 237-251 (1976).
4. A.K.Nikitin, A.A.Tishchenko, "Surface electromagnetic waves and its application", Zarubezhnaya Radioelektron. (Moscow) 3, 38-56 (1983).
5. P.B.Johnson and R.W.Christy, "Optical constants of the noble metals", Phys. Rev.B, 6(12), 4370-4379 (1972).
6. D.K.Burge, J.M.Bennett, R.L.Peck and H.E.Benneu "Growth of surface films on silver", Surf. Science 16(1), 303-320 (1969).
7. Jing-Jiang Xu and Jin-Fa Tang, "Optical properties of extremely thin films: studies using ATR techniques", Applied Optics 28(14), 2925-2928 (1989).