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Volumn 85, Issue 8, 2008, Pages 1811-1814
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Mirror electron microscope for inspecting nanometer-sized defects in magnetic media
a
a
HITACHI LTD
(Japan)
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Author keywords
Defect inspection; Magnetic media; Mirror electron microscope
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Indexed keywords
CHEMICAL SENSORS;
DEFECTS;
DISKS (STRUCTURAL COMPONENTS);
ELECTRON BEAM LITHOGRAPHY;
ELECTRON MICROSCOPES;
HARD DISK STORAGE;
IMAGE ACQUISITION;
IMAGE ENHANCEMENT;
INSPECTION;
LENSES;
MAGNETIC FIELDS;
MAGNETIC MATERIALS;
MAGNETIC STORAGE;
MAGNETISM;
MICROSCOPES;
MIRRORS;
NONVOLATILE STORAGE;
OPTICAL INSTRUMENT LENSES;
OPTICAL INSTRUMENTS;
THROUGHPUT;
(I ,J) CONDITIONS;
ARTIFICIAL DEFECTS;
ATOMIC FORCE MICROSCOPE (AFM);
DEFECT INSPECTION;
DETECTION SENSITIVITY;
DISTORTION (DEFORMATION);
ELECTRICAL POTENTIALS;
ELSEVIER (CO);
HARD DISK DRIVES (HDDS);
HIGH-THROUGHPUT (HT);
HIGHLY SENSITIVE;
IMAGE ACQUISITION TIME;
INSPECTION TIME;
MAGNETIC (CE);
MAGNETIC DISKS;
MAGNETIC MEDIUM;
OBJECTIVE LENSES;
OUT OF FOCUS;
PROMISING TECHNIQUE;
RESOLUTION POWER;
SURFACE INSPECTIONS;
MAGNETIC DISK STORAGE;
DATA STORAGE;
DEFECTS;
DISKS;
ELECTRIC POTENTIAL;
ELECTRON BEAMS;
IMAGE ANALYSIS;
INSPECTION;
LENSES;
LITHOGRAPHY;
MAGNETIC FIELDS;
MAGNETIC MATERIALS;
MIRRORS;
OPTICAL INSTRUMENTS;
SCANNING ELECTRON MICROSCOPY;
SENSORS;
THROUGHPUT;
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EID: 48949115553
PISSN: 01679317
EISSN: None
Source Type: Journal
DOI: 10.1016/j.mee.2008.05.018 Document Type: Article |
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Times cited : (22)
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References (8)
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