Manipulation system for nano/micro components integration via transportation and self-assembly

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2008, Pages 836-839

  Higuchi, Y ^a   Kusakabe, T ^a   Tanemura, T ^a   Sugano, K ^a   Tsuchiya, T ^a   Tabata, O ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC NETWORK ANALYSIS; MANIPULATORS; MECHANICAL ENGINEERING; MECHANICS; MECHATRONICS; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL TWEEZERS; OPTOELECTRONIC DEVICES; REACTIVE ION ETCHING; SELF ASSEMBLY;

COMPONENTS INTEGRATION; INTERNATIONAL CONFERENCES; MANIPULATION SYSTEM; MICRO-ELECTRO MECHANICAL SYSTEMS; OPTOELECTRONIC TWEEZERS; SELF- ASSEMBLIES; THEORETICAL ANALYSIS;

PHOTORESISTS;

EID: 48849106043     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2008.4443786     Document Type: Conference Paper

References (8)

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