Design study of micromachined thermal emitters for NDIR gas sensing in the 9-12 μm wavelength range

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 181-184

  Cozzani, Enrico ^a   Summonte, Caterina ^a   Belsito, Luca ^a   Cardinali, Gian Carlo ^a   Roncaglia, Alberto ^a  

^a CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

GAS DETECTORS; GAS SENSING ELECTRODES; LEAKAGE (FLUID); MODULATION; NITRIDES; OPTICAL PROPERTIES; PLATINUM; SENSORS; SILICA; SILICON COMPOUNDS;

DESIGN STUDIES; DIELECTRIC MEMBRANES; DIELECTRIC STACKS; EMISSION EFFICIENCIES; EMITTER GEOMETRIES; FINITE ELEMENTS; LOW POWERS; MICROMACHINED; OPTICAL RADIANCES; OPTIMIZED DESIGNS; SILICON OXIDES; STRUCTURAL LAYERS; TECHNOLOGY BASED; THERMAL SIMULATIONS; WAVELENGTH RANGES;

OPTICAL SENSORS;

EID: 48349116580     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388366     Document Type: Conference Paper

References (6)

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