Polymer mass loading of CMOS/MEMS microslot cantilever for gravimetric sensing

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 1164-1167

  Bedair, Sarah S ^a   Fedder, Gary K ^a,b  

^a CARNEGIE MELLON UNIVERSITY   (United States)

^b CARNEGIE MELLON UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ASPECT RATIO; DISSOLUTION; OPTICAL DESIGN; POLYMERS; PRINTING; SENSORS; SURFACE CHEMISTRY; SURFACE TENSION;

AND DETECTION; DEVICE SCALING; FABRICATION METHODS; INK-JET PRINTING; LOW-NOISE; MASS RATIOS; MASS SENSITIVITY; MICRO-CANTILEVERS; NANOGRAM; POLYBUTYL METHACRYLATE; POLYMER MASS LOADING; RESONANT MODES; SENSING APPLICATIONS; SURFACE TENSION FORCES; WICKING;

PHOTORESISTS;

EID: 48349111068     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388614     Document Type: Conference Paper

References (9)

1. P. Cooley, et al.,"Applications of ink-jet printing technology to BioMEMS and microfluidic systems", SPIE Conf. on Micromachining and Microfabrication, 2001.
2. L. Weiss, L. Schultz, and E. Miller, "Inkjet deposition system with computer vision-based calibration for targetting accurac," Technical report CMU-RI-TR-06-15, Carnegie Mellon University, March, 2006, http://www.ri.cmu. edu/pubs/pub_5380.html.
3. A. Hierlemann and H. Baltes, "CMOS-based chemical microsensors," Analyst, 128, p. 15-28, 2003.
4. Bietsch, A., Zhang, J., Hegner, M., Lang, H. P., and Gerber, C., "Rapid functionalization of cantilever array sensors by inkjet printing", Nanotechnology, 15, pp. 873-880, 2004.
5. S. S. Bedair and G. K. Fedder, "Polymer wicking to mass load cantilevers for chemical gravimetric sensors," IEEE Transducers '05, Seoul, Korea, pp. 2035-9.
6. M. Dreyer, A. Delgado, and H. J. Rath, "Fluid Motion in Capillary Vanes Under reduced gravity", Microgravity Sci. Teehnol., pp. 203-210, 1993.
7. G. K. Fedder, S. Santhanum, M.L. Reed, S. C. Eagle, D. F. Guillou, M. S. C. Lu, and L. R. Carley, "Laminated high-aspect-ratio microstructures in a conventional CMOS process," Proc. of the 9th IEEE International Workshop on MEMS, San Diego, CA, February 15-17, 1996, pp. 13-18.
8. S. Timoshenko, D. H. Young, and W. Weaver, Vibration Problems in Engineering, New York, 1974.
9. I. Dufour, F. Lochon, S. Heinrich, F. Josse, and D. Rebiere, "Effect of coating on quality factor and limit of detection of microcantilever chemical sensors", IEEE Sensors, vol 7, no. 2, February, 2007.