A novel circular SAW (surface acoustic wave) device in CMOS

Proceedings of IEEE Sensors

Volumn , Issue , 2007, Pages 474-477

  Tigli, Onur ^a   Zaghloul, Mona E ^a  

^a George Washington University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

3D MODELS; 3DB BANDWIDTHS; CONVENTIONAL DEVICES; FINITE ELEMENT ANALYSIS; IMPROVED PERFORMANCES; NOVEL ARCHITECTURES; POST-PROCESSING; SAW DEVICES; SELECTIVE SENSORS; SURFACE ACOUSTIC WAVES; TRANSFER CHARACTERISTICS;

ACOUSTIC WAVES; ACOUSTICS; ACOUSTOELECTRIC EFFECTS; ARCHITECTURE; CHARGE COUPLED DEVICES; ELASTIC WAVES; FINITE ELEMENT METHOD; LOGIC CIRCUITS; METAL WORKING SAWS; METALLIC COMPOUNDS; MOS DEVICES; SAWING; SAWS; SEMICONDUCTOR MATERIALS; SENSORS; THREE DIMENSIONAL;

ACOUSTIC SURFACE WAVE DEVICES;

EID: 48349088010     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2007.4388439     Document Type: Conference Paper

References (7)

1. O. Tigli, M. Zaghloul, " A Novel SAW Device in CMOS: Design, Modeling and Fabrication", IEEE Sensors Journal, February 2007, pp 214-223.
2. O. Tigli, M. Zaghloul, "Design and Fabrication of a Novel SAW Biochemical Sensor in CMOS", IEEE Sensors Oct. 2005, Special Session: CMOS Based Sensors, Invited Talk, Irvine, CA.
3. M.R.T. Tan and C.A. Flory, " Minimization of diffraction effets in SAW devices using a wide aperture", Proc. 1986 IEEE Ultrasonic Symp., pp. 13-17, 1986.
4. G.W. Farnell, "Elastic surface waves", in H.Matthews (ed.) "Surface Wave Filters", John Wiley and Sons, New York, Chapter 1, 1977.
5. Colin K. Campbell, "Surface Acoustic Wave Devices" for Mobile and Wireless Communications, 1998, pp 168-193.
6. www.mosis.org
7. www.coventor.com