Electrostatically actuated silicon-based nanomechanical switch at room temperature

Applied Physics Letters

Volumn 93, Issue 3, 2008, Pages

  Guerra, Diego N ^a   Imboden, Matthias ^a   Mohanty, Pritiraj ^a  

^a Boston University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DAMPING; ELECTROSTATIC ACCELERATORS; ELECTROSTATIC ACTUATORS; SILICON;

AMERICAN INSTITUTE OF PHYSICS (AIP); DRIVE SIGNALS; ELECTROSTATIC ACTUATIONS; HIGH SPEEDS; HIGH-FREQUENCY (HF); LOW POWERS; MECHANICAL SWITCHING; NANOMECHANICAL DEVICES; NANOMECHANICAL RESONATOR (NAMR); NON-LINEAR REGIMES; ON CHIPS; P RIOR WORK; ROOM-TEMPERATURE (RT); SILICON CIRCUITRY; SILICON-BASED; SWITCHING DEVICES;

NONMETALS;

EID: 48249150426     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2964196     Document Type: Article

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