Characterization of oxide films by MeV ion beam techniques

Journal of Physics Condensed Matter

Volumn 20, Issue 26, 2008, Pages

  Dobeli M ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

BEAM PLASMA INTERACTIONS; ENERGY DISSIPATION; ION BEAMS; ION BOMBARDMENT; IONS; NONMETALS; OXYGEN; REAL TIME SYSTEMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SCATTERING; SENSITIVITY ANALYSIS; STOICHIOMETRY; THICK FILMS;

COMPOSITIONAL ANALYSIS; COMPOSITIONAL DEPTH; DEPTH RESOLUTION; ELASTIC NUCLEAR SCATTERING; ELASTIC RECOIL DETECTION ANALYSIS (ERDA); ENERGY LOSS OF IONS; FORWARD SCATTERING; ION BEAM TECHNIQUES; ION-BEAM-ANALYSIS (IBA); NUCLEAR RESONANCES; RUTHERFORD BACKSCATTERING SPECTROMETRY (RBS); THIN LAYERING;

OXIDE FILMS;

EID: 48249121158     PISSN: 09538984     EISSN: 1361648X     Source Type: Journal    
DOI: 10.1088/0953-8984/20/26/264010     Document Type: Article

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