High temperature langasite BAW gas sensor based on ZnO nano wire arrays

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1361-1364

  Cheng, Hongbin ^a   Qin, Lifeng ^a   Wang, Qing Ming ^a  

^a PA 15260   (United States)

Author keywords

Acoustic wave device; Langasite thickness shaer mode resonator; NO2 gas sensor; ZnO nanowire arrays

Indexed keywords

CHEMICAL SENSORS; ELECTRIC WIRE; GAS DETECTORS; IMAGING TECHNIQUES; NANOSTRUCTURED MATERIALS; NANOWIRES; OPTICAL DESIGN; RESONATORS; SEMICONDUCTING ZINC COMPOUNDS; SENSORS; ULTRASONICS; X RAY ANALYSIS; ZINC ALLOYS; ZINC OXIDE;

ACOUSTIC WAVE DEVICE; C -AXIS; GAS SENSORS; HIGH TEMPERATURE; HYDROTHERMAL ROUTES; LANGASITE; LANGASITE RESONATORS; LANGASITE THICKNESS SHAER MODE RESONATOR; NO2 GAS SENSOR; SCANNING ELECTRON MICROSCOPY (SEM); THICKNESS-SHEAR MODE; VERTICALLY ALIGNED; X-RAY DIFFRACTION; ZNO NANOWIRE; ZNO NANOWIRE ARRAYS; ZNO NANOWIRES; ZNO SEED;

NANOSTRUCTURES;

EID: 48149104372     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.342     Document Type: Conference Paper

References (17)

1. G.W. Hunter, P.G. Neudeok, C.C. Liu, B. Ward, Q.H. Wu, P. Dutta, M. Frank, J. Trimbol, M. Fulkerson, B. Patton, "Development of chemical sensor arrays for harsh environments and aerospace applications", in: Proceedings of the IEEE Sensors, 2002, pp. 1126-1133.
2. J. Hornsteiner, E. Born, G. Fischerauer, E. Riha, "Surface acoustic wave sensors for high temperature applications", IEEE Int. Freq. Countr. Symp., 1998, pp.615-620.
3. D. Damjanovic, "Materials for high temperature piezoelectric transducers", Curr. Opin. Solid State Mater. Sci. 3, 1998, pp.469-473.
4. B. Mill, Y. Pisarevsky, "langasite-type materials from discovery to present state", IEEE Int. Freq. Countr. Symp., pp. 133-140, 2000.
5. D. Richter, H. Fritze, T. Schneider, P. Hauptmann, N. Bauersfeld, K.-D. Kramer, K. Wiesner, M. Fleischer, G. Karle and A. Schubert, "Integrated high temperature gas sensor system based on bulk acoustic wave resonators", Sens. Actuators B 118, pp. 466-471, 2006
6. E. Ansorge, S. Schimpf, S. Hirsch, J. Sauerwald, H. Fritze and B. Schmidt. "Evaluation of langasite (La3Ga5SiO14) as a material for high temperature microsystems", Sens. Actuators A130-131, pp.393-396 2006
7. J.A. Thiele and M. Pereira da Cunha, "High temperature LGS SAW gas sensor", Sens. Actuators B113, pp 816-822, 2006
8. x sensor", Sens. Actuators B 66, pp. 119-121, 2000.
9. S.J. Ippolito, S. Kandasamy, K. Kalantar-zadeh, W. Wlodarski, K. Galatsis, G. Kiriakidis, N. Katsarakis and M. Suchea, "Highly sensitive layered ZnO/LiNbO3 SAW device with InOx selective layer for NO2 and H2 gas sensing", Sens. Actuators Bill, pp. 207-212, 2005.
10. S.J. Ippolito, S. Kandasamy, K. Kalantar-Zadeh and W. Wlodarski, "Layered SAW hydrogen sensor with modified tungsten trioxide selective layer", Sens. Actuators B 108, pp.553-557, 2005
11. 3 at room temperature", Sens. Actuators B 55, pp. 166-169, 1999.
12. M. Huang, S. Mao, H. Feick, H. Yan, Y. Wu, H. Kind, E. Weber, R. Russo, and P. Yang, "Room-Temperature Ultraviolet Nanowire Nanolasers", Science 292, p. 1897, 2001
13. Z.L. Wang, "Nanobelts, Nanowires, and Nanodiskettes of Semiconducting Oxides - From Materials to Nanodevices", Adv. Mater, pp.432-436, 2003
14. H. Cheng, J. Cheng, Y. Zhang, and Q.-M.Wang, "Large-scale fabrication of ZnO micro-and nano-structures by microwave thermal evaporation deposition" J. of Crystal Growth, 299, pp.34-40, 2007
15. Z.P. Sun, L. Liu, L. Zhang, and D. Z. Jia, "Rapid sythesis of ZnO nanorods by one-step, room temperature, solid-state reaction and their gassensing properties", Nanotechnology 17, pp. 2266-2270, 2006.
16. L. Greene, M. Law, D. Tan, M. Montano, J. Goldberger, G. Somorjai, and P. Yang, "General route to vertical ZnO nanowire arrays using textured ZnO seeds", NANO letters 5, pp. 1231-1236, 2005.
17. H. Fritze, H. Seh, H. L. Tuller, G. Borchardt, "Operation limits of langasite high temperature nanobalances", Journal of the European Ceramic Society 21, pp. 1473-1477, 2001.