Thin film stack transducer for simultaneous generation of longitudinal and shear waves at same frequency

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2007, Pages 1874-1877

  Yanagitani, Takahiko ^a   Matsuo, Takuya ^b   Matsukawa, Mami ^b   Yoshiaki, Watanabe ^b  

^a TOHOKU UNIVERSITY   (Japan)

^b DOSHISHA UNIVERSITY   (Japan)

Author keywords

c axis tilted ZnO film; Simultaneous generation of longitudinal and shear waves; Ultrasonic transducer in the VHF range

Indexed keywords

MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL DESIGN; SEMICONDUCTING ZINC COMPOUNDS; SILICA; SILICATE MINERALS; SILICON COMPOUNDS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; ULTRASONICS; ZINC ALLOYS; ZINC OXIDE;

BULK WAVES; C -AXIS; C-AXIS-TILTED ZNO FILM; CONVERSION LOSSES; CRYSTALLINE ORIENTATIONS; CRYSTALLOGRAPHIC PROPERTIES; FILM SURFACES; RF-MAGNETRON SPUTTERING; SILICA-GLASS SUBSTRATES; SIMULTANEOUS GENERATION OF LONGITUDINAL AND SHEAR WAVES; THIN-FILM FABRICATION; THIN-FILM STACKS; TRANSDUCER STRUCTURE; TWO LAYERS; ULTRASONIC TRANSDUCER IN THE VHF RANGE; UPPER LAYERS; XRD POLE FIGURE; ZNO FILMS;

TRANSDUCERS;

EID: 48149102458     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2007.471     Document Type: Conference Paper

References (7)

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