Properties of aluminum doped zinc oxide thin film by sol-gel process

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6831, Issue , 2008, Pages

  Yi, Sung Hak ^a   Choi, Seung Kyu ^a   Jang, Jae Min ^a   Kim, Jung A ^a   Jung, Woo Gwang ^a  

^a Kookmin University   (South Korea)

Author keywords

Al doping; Sol gel; Transparent conducting oxide film; ZnO; ZnO thin film

Indexed keywords

ALUMINA; ALUMINUM; COLLOIDS; CONDUCTIVE FILMS; CRYSTAL STRUCTURE; DOPING (ADDITIVES); ELECTRIC CONDUCTIVITY; GELATION; GELS; HEAT TREATING FURNACES; HEAT TREATMENT; LIGHT METALS; METALLIC FILMS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; OPTICAL FILMS; OXIDE FILMS; PHOTONICS; SEMICONDUCTING ZINC COMPOUNDS; SOL-GELS; SOLIDS; SOLS; THIN FILM DEVICES; THIN FILMS; ZINC; ZINC OXIDE;

AL DOPING; ANNEALING TEMPERATURES; DEPOSITION PARAMETERS; DEVICE APPLICATIONS; DOPED ZINC OXIDE THIN FILMS; DOPING CONCENTRATIONS; EFFECTIVE DOPING; ELECTRICAL CONDUCTIVITIES; FILM RESISTANCES; HIGH TRANSMITTANCES; HIGH TRANSPARENCIES; LARGE AREA THIN FILMS; LOW COSTS; LOW RESISTIVITIES; PRECURSOR CONCENTRATIONS; PREFERRED ORIENTATIONS; THERMAL TREATMENTS; TRANSPARENT CONDUCTING OXIDE FILM; VISIBLE REGIONS; ZNO; ZNO FILMS; ZNO THIN FILM;

SOL-GEL PROCESS;

EID: 47949130386     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.757447     Document Type: Conference Paper

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