Optimizing precision of rotating compensator ellipsometry

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1036-1040

  Broch, L ^a   Johann, L ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETERS; ERROR REDUCTION; EXPERIMENTAL VERIFICATION; HIGH DEGREE OF ACCURACY; NEW POSITION;

OPTICAL INSTRUMENTS; SPECTROSCOPIC ELLIPSOMETRY; TANNING;

RANDOM ERRORS;

EID: 47849132949     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777761     Document Type: Conference Paper

References (11)

1. P. S. Hauge and F. H. Dill, Optic Commun. 14, 431 (1975).
2. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977).
3. R. W. Collins, Rev. Sci. Instrum. 61, 2029 (1990).
4. R. Kleim, L. Kuntzler, and A. El Ghemmaz, J. Opt. Soc. Am. A 9, 11 (1994).
5. Z. Huang and J. Chu, Appl. Opt. 39, 6390 (2000).
6. D. E. Aspnes, J. Opt. Soc. Am. A 3, 21 (2004).
7. D. E. Aspnes, J. Opt. Soc. Am. A 5, 64 (1974).
8. A. En Naciri, L. Broch, L. Johann, and R. Kleim, Thin Solid Films 406, 103 (2002).
9. Horiba Jobin-Yvon S.A.S., Digital Ellipsometer, Longjumeau, France.
10. C. C. Kim, P. M. Raccah, and J. W. Garland, Rev. Sci. Instrum. 63, 2958 (1992).
11. D. Clarke and J. F. Grainger, Polarized Light and Optical Measurement (Pergamon, Oxford, 1971).