Optimizing precision of fixed-polarizer, rotating-polarizer, sample, and fixed-analyzer spectroscopic ellipsometry

Applied Optics

Volumn 39, Issue 34, 2000, Pages 6390-6395

  Huang, Zhiming ^a   Chu, Junhao ^a  

^a SHANGHAI INSTITUTE OF TECHNICAL PHYSICS   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ELLIPSOMETRY; LIGHT REFLECTION; PRECISION ENGINEERING; SHOT NOISE; SPECTROSCOPIC ANALYSIS; SYSTEMATIC ERRORS;

DETECTOR-NOISE-LIMITED (DNL) CONDITIONS;

LIGHT POLARIZATION;

EID: 0008842634     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.006390     Document Type: Article

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