메뉴 건너뛰기




Volumn 42, Issue 5, 2008, Pages 749-759

Modeling and simulation of material removal with particulate flows

Author keywords

CMP; Granular flow; Material removal

Indexed keywords

DRAG; FLOW VELOCITY; GENETIC ALGORITHMS; GEOMETRY; INVERSE PROBLEMS; PARTICLE SIZE; PARTICLE SIZE ANALYSIS; VELOCITY;

EID: 47849097952     PISSN: 01787675     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00466-008-0273-3     Document Type: Article
Times cited : (12)

References (23)
  • 1
    • 0036343296 scopus 로고    scopus 로고
    • Erosion of ductile and brittle materials
    • Aquaro D and Fontani E (2001). Erosion of ductile and brittle materials. Meccanica 36: 651-661
    • (2001) Meccanica , vol.36 , pp. 651-661
    • Aquaro, D.1    Fontani, E.2
  • 2
    • 47849086590 scopus 로고    scopus 로고
    • Erosion due to the impact of solid particles of materials resistant at high temperatures
    • Aquaro D (2006). Erosion due to the impact of solid particles of materials resistant at high temperatures. Meccanica 41: 539-551
    • (2006) Meccanica , vol.41 , pp. 539-551
    • Aquaro, D.1
  • 3
    • 3943090889 scopus 로고
    • A study of erosion phenomena part i
    • Bitter JPA (1963). A study of erosion phenomena part I. Wear 6: 5-21
    • (1963) Wear , vol.6 , pp. 5-21
    • Bitter, J.P.A.1
  • 4
    • 50549201243 scopus 로고
    • A study of erosion phenomena part II
    • Bitter JPA (1963). A study of erosion phenomena part II. Wear 6: 169-190
    • (1963) Wear , vol.6 , pp. 169-190
    • Bitter, J.P.A.1
  • 6
    • 0025417082 scopus 로고
    • Chemical processes in glass polishing
    • Cook LM (1990). Chemical processes in glass polishing. J Non-Crystal Solids 120: 152-171
    • (1990) J Non-Crystal Solids , vol.120 , pp. 152-171
    • Cook, L.M.1
  • 8
    • 0009400363 scopus 로고
    • Erosion of surfaces by solid particles
    • Finnie I (1960). Erosion of surfaces by solid particles. Wear 3: 87-103
    • (1960) Wear , vol.3 , pp. 87-103
    • Finnie, I.1
  • 12
    • 85040875608 scopus 로고
    • Cambridge University Press Cambridge
    • Johnson K (1985). Contact mechanics. Cambridge University Press, Cambridge
    • (1985) Contact Mechanics
    • Johnson, K.1
  • 13
    • 29144445312 scopus 로고    scopus 로고
    • Finite-element analysis of single particle impact in abrasive water jet machining
    • Junkar M, Jurisevic B, Fajdiga M and Grah M (2006). Finite-element analysis of single particle impact in abrasive water jet machining. Int J Impact Eng 32: 1095-1112
    • (2006) Int J Impact Eng , vol.32 , pp. 1095-1112
    • Junkar, M.1    Jurisevic, B.2    Fajdiga, M.3    Grah, M.4
  • 14
    • 0036494503 scopus 로고    scopus 로고
    • Structural optimization using evolutionary algorithms
    • Lagaros N, Papadrakakis M and Kokossalakis G (2002). Structural optimization using evolutionary algorithms. Comput Struct 80: 571-589
    • (2002) Comput Struct , vol.80 , pp. 571-589
    • Lagaros, N.1    Papadrakakis, M.2    Kokossalakis, G.3
  • 15
    • 0003958397 scopus 로고    scopus 로고
    • Chemical mechanical polishing in silicon processing
    • Academic Press, London
    • Li SW, Miller RO (2000) Chemical mechanical polishing in silicon processing. Semiconductors and semimetals. Academic Press, London, vol 63
    • (2000) Semiconductors and Semimetals , vol.63
    • Li, S.W.1    Miller, R.O.2
  • 17
    • 0001611894 scopus 로고
    • The theory and design of plate glass polishing machines
    • Preston F (1927). The theory and design of plate glass polishing machines. J Soc Glass Technol 11: 214-256
    • (1927) J Soc Glass Technol , vol.11 , pp. 214-256
    • Preston, F.1
  • 18
    • 0034206016 scopus 로고    scopus 로고
    • Investigation of removal rate properties of a floating polishing process
    • 6
    • Su YT (2000). Investigation of removal rate properties of a floating polishing process. J Electrochem Soc 147(6): 2290-2296
    • (2000) J Electrochem Soc , vol.147 , pp. 2290-2296
    • Su, Y.T.1
  • 20
    • 7444235957 scopus 로고    scopus 로고
    • Modeling and direct simulation of near-field granular flows
    • Zohdi TI (2004). Modeling and direct simulation of near-field granular flows. Int J Solids Struct 42/2: 539-564
    • (2004) Int J Solids Struct , vol.42 , Issue.2 , pp. 539-564
    • Zohdi, T.I.1
  • 21
    • 17144389331 scopus 로고    scopus 로고
    • A computational framework for agglomeration in thermo-chemically reacting granular flows
    • 2052
    • Zohdi TI (2004). A computational framework for agglomeration in thermo-chemically reacting granular flows. Proc R Soc 460(2052): 3421-3445
    • (2004) Proc R Soc , vol.460 , pp. 3421-3445
    • Zohdi, T.I.1
  • 22
    • 14344257327 scopus 로고    scopus 로고
    • Charge-induced clustering in multifield granular flow
    • 7
    • Zohdi TI (2005). Charge-induced clustering in multifield granular flow. Int J Numer Methods Eng 62(7): 870-898
    • (2005) Int J Numer Methods Eng , vol.62 , pp. 870-898
    • Zohdi, T.I.1
  • 23
    • 34447128186 scopus 로고    scopus 로고
    • Computation of strongly coupled multifield interaction in particle-fluid systems
    • Zohdi TI (2007). Computation of strongly coupled multifield interaction in particle-fluid systems. Comput Methods Appl Mech Eng 196: 3927-3950
    • (2007) Comput Methods Appl Mech Eng , vol.196 , pp. 3927-3950
    • Zohdi, T.I.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.