Evaluation of internal stresses in single-, double- and multi-layered TiN and TiAlN thin films by synchrotron radiation

JSME International Journal, Series A: Solid Mechanics and Material Engineering

Volumn 47, Issue 3, 2004, Pages 312-317

  Hanabusa, Takao ^a   Kusaka, Kazuya ^a   Matsue, Tatsuya ^b   Nishida, Masayuki ^c   Sakata, Osami ^d   Sato, Toshiki ^e  

^a UNIVERSITY OF TOKUSHIMA   (Japan)

^b NIIHAMA NATIONAL COLLEGE OF TECHNOLOGY   (Japan)

^c KOBE CITY COLLEGE OF TECHNOLOGY   (Japan)

^d JAPAN SYNCHROTRON RADIATION RESEARCH INSTITUTE   (Japan)

^e KOBE STEEL LTD   (Japan)

Author keywords

Multi Layer structure; Residual stress; Synchrotron radiation; TiAlN; TiN; Tin film; X Ray diffractin

Indexed keywords

MULTILAYERS; PLATING; RESIDUAL STRESSES; STEEL; SUBSTRATES; SYNCHROTRON RADIATION; THIN FILMS; TITANIUM NITRIDE; X RAYS;

ARC-ION PLATING; RESIDUAL STRESS MEASUREMENT;

STRESS ANALYSIS;

MEASUREMENT METHOD;

EID: 4744353817     PISSN: 13447912     EISSN: None     Source Type: Journal    
DOI: 10.1299/jsmea.47.312     Document Type: Article

References (12)

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