Continuous 2-sided roll to roll nanopatterning of a polymer film

Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC

Volumn , Issue , 2007, Pages 426-427

  Makela T ^a   Lambertini, V ^b   Haatainen, T ^a   Majander, P ^a   Ahopelto, J ^a  

^a VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^b CENTRO RICERCHE FIAT   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC FORCE MICROSCOPY; FLOW OF FLUIDS; NANOIMPRINT LITHOGRAPHY; NANOTECHNOLOGY; OPTICAL MICROSCOPY; PLASTIC FILMS; POLYMER FILMS; POLYMERS;

CELLULOSE ACETATE (CA); IMPRINT TIME; IMPRINTED STRUCTURES; INTERNATIONAL (CO); MICRO-PROCESSES; NANO SIZE STRUCTURES; NANO-PATTERNING; OPTICAL (PET) (OPET); PRINTED STRUCTURES; ROLL-TO-ROLL; WAFER-SCALE;

IMAGING TECHNIQUES;

FLUID DYNAMICS; LITHOGRAPHY; PLASTIC FILMS; POLYMERS; PRINTING;

EID: 47349097464     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IMNC.2007.4456286     Document Type: Conference Paper

References (4)

1. C-Y. Chang, S-Y. Yang and M-H.Chu, Microelectr. Eng. 84 (2007) 355
2. T. Mäkelä, T. Haatainen, P. Majander and J. Ahopelto, Microelectr. Eng. 84 (2007) 877
3. T. Haatainen, P. Majander, T. Riekkinen, J. Ahopelto, Microel. Eng. 83 (2006) 948
4. T. Mäkelä & Al., The Fifth International Nanoimprint and Nanoprint Technology Conference, NNT'06, San Francisco, 15.-17.11.2006 (2006)