Universal designed structures for strict pitch measurements using scanning probe microscopes

Key Engineering Materials

Volumn 381-382, Issue , 2008, Pages 605-606

  Sugawara, K ^a   Sato, O ^a   Yoshizaki, K ^a   Misumi, I ^a   Gonda, S ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

AFM; Nanometrology; Orthogonality; Pitch; Two dimensional grating

Indexed keywords

ATOMIC FORCE MICROSCOPY; LASER INTERFEROMETRY;

LASER INTERFEROMETER; NANOMETROLOGY; ORTHOGONALITY; PITCH; PITCH VALUES; SCANNING PROBES; TWO-DIMENSIONAL (2D) GRATINGS; TWO-DIMENSIONAL GRATING;

INTERFEROMETERS;

EID: 47049116317     PISSN: 10139826     EISSN: 16629795     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/kem.381-382.605     Document Type: Article

References (1)

1. K. Sugawara, O. Sato, K. Yoshizaki, I. Misumi, S. Gonda, T. Takatsuji and J. Kitta: Journal of the Chinese Society of Mechanical Engineers, Vol. 27 (2006), No. 5, pp. 531-534.