Characterization of polymer thin films prepared with RF sputtering with fluorocarbon polymer targets

Journal of the Vacuum Society of Japan

Volumn 51, Issue 3, 2008, Pages 201-204

  Kezuka, Kazuya ^a   Uemura, Akihiro ^a   Iwamori, Satoru ^a  

^a KANAZAWA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHEMICAL SENSORS; CONTACT ANGLE; ETHYLENE; FILM PREPARATION; FLUORINE CONTAINING POLYMERS; FOURIER TRANSFORM INFRARED SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY; POLYMER FILMS; POLYMERS; POLYTETRAFLUOROETHYLENES; SPUTTERING;

ELEMENTAL COMPOSITIONS; FLUORINATED ETHYLENE PROPYLENE COPOLYMERS; FLUOROCARBON POLYMERS; FLUOROCARBON THIN FILMS; FOURIER TRANSFORM INFRA RED (FTIR) SPECTROSCOPY; PHOTOELECTRON SPECTROSCOPY (XPS); POLYMER THIN FILMS; SPUTTERING TARGET;

THIN FILMS;

EID: 46749145811     PISSN: 18822398     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj2.51.201     Document Type: Article

References (6)

1. Japanese source
2. V. Stelmashuk, H. Biederman, D. Slavínská, J. Zemek, M. Trchová: Vacuum, 77 (2005) 131.
3. Japanese source
4. V. Stelmashuk, H. Biederman, D. Slavínská, M. Trchová, P. Hlidek: Vacuum, 75 (2004) 207.
5. I. Kholodkov, H. Biederman, D. Slavínská, A. Choukourov, M. Trchova: Vacuum 70 (2003) 505
6. Japanese source