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Volumn , Issue , 2006, Pages 189-192
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Design and simulation of humidity micro-sensors structure based on Polymers
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Author keywords
[No Author keywords available]
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Indexed keywords
DETECTORS;
ELECTRIC CONDUCTIVITY;
METEOROLOGY;
MICROSYSTEMS;
MOISTURE;
POLYMERS;
SEMICONDUCTOR DEVICE MANUFACTURE;
SEMICONDUCTOR DEVICE MODELS;
SEMICONDUCTOR MATERIALS;
SEMICONDUCTOR SWITCHES;
SENSORS;
CONFERENCE PROCEEDINGS;
COVENTORWARE;
DESIGN AND SIMULATION;
INTERNATIONAL CONFERENCES;
MICRO CANTILEVERS;
MICRO-SENSORS;
SIMULATION DATA;
SURFACE STRAINING;
SEMICONDUCTOR DEVICES;
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EID: 46749134022
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1109/ASDAM.2006.331186 Document Type: Conference Paper |
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Times cited : (1)
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References (6)
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