Simulation of capacitive type bimorph humidity sensors

Journal of Physics: Conference Series

Volumn 10, Issue 1, 2005, Pages 305-308

  Fragakis, J ^a   Chatzandroulis, S ^b   Papadimitriou, D ^a   Tsamis, C ^b  

^a NATIONAL TECHNICAL UNIVERSITY OF ATHENS   (Greece)

^b INSTITUTE OF MICROELECTRONICS   (Greece)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 22544484223     PISSN: 17426588     EISSN: 17426596     Source Type: Conference Proceeding    
DOI: 10.1088/1742-6596/10/1/075     Document Type: Article

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