Leak calibration by comparison with reference standard leaks

Vacuum

Volumn 82, Issue 11, 2008, Pages 1151-1156

  Hidalgo, J M ^a   de Segovia, J L ^b  

^a Telstar Industrial SL ^*  (Spain)

^b INSTITUTO DE CIENCIA DE MATERIALES DE MADRID   (Spain)

Author keywords

Leak detection; Uncertainties

Indexed keywords

INDUSTRIAL APPLICATIONS; MEASUREMENT THEORY; STANDARDS; UNCERTAINTY ANALYSIS;

LEAK CALIBRATION; REFERENCE STANDARD LEAKS;

LEAK DETECTION;

EID: 46549089625     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.01.050     Document Type: Review

References (7)

1. See Standards EN3192 and ISO 3530; 1979.
2. Calcatelli A., Bergoglio M., and Mari D. Leak detection, calibrations and reference flows: practical example. Vacuum 81 (2007) 1538-1544
3. Method for vacuum leak calibration. AVS 2.1 Rev, 1973.
4. Bley W.G. Helium leak detectors: from laboratory device to dedicated industrial leak units. Vacuum 44 5-7 (1993) 627-632
5. Ehrlich C.D., and Basford J.A. Recommended practices for calibration and use of leaks. J Vac Sci Technol A 10 1 (Jan/Feb 1992) 1-17
6. Reich G. Leak detection with tracer gases, sensitivity and relevant limiting factors. Vacuum 37 8/9 (1987) 691-698
7. ISO. Guide to the expression of uncertainty in measurements (1993), ISO. 92-67-101889 EA-4/02