Identification and evaluation of a dynamic model for a thin film deposition process

Proceedings of the American Control Conference

Volumn , Issue , 2007, Pages 4124-4129

  Oguz, Cihan ^a   Gallivan, Martha A ^a  

^a Georgia Institute of Technology   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADMINISTRATIVE DATA PROCESSING; BOOLEAN FUNCTIONS; CHEMICAL VAPOR DEPOSITION; CONFORMAL MAPPING; DYNAMIC PROGRAMMING; FINANCIAL DATA PROCESSING; MATHEMATICAL MODELS; MOLECULAR STRUCTURE; PRINCIPAL COMPONENT ANALYSIS; SELF ORGANIZING MAPS; SOLIDS; TESTING; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

EUCLIDEAN DISTANCE (ED); HIGH-DIMENSIONAL; KINETIC MONTE CARLO (KMC) SIMULATIONS; MODEL REDUCTIONS; MOLECULAR SIMULATIONS; PRINCIPAL COMPONENT ANALYSIS (PCA); RANDOM INPUT; SELF ORGANIZING MAP (SOM); SIMPLE CELL; SURFACE CONFIGURATIONS; THIN-FILM DEPOSITIONS;

DYNAMIC MODELS;

EID: 46449129424     PISSN: 07431619     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ACC.2007.4282844     Document Type: Conference Paper

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