Full Si wafer conversion into bulk 3C-SiC

Materials Science Forum

Volumn 389-393, Issue 1, 2002, Pages 147-150

  Leycuras, A ^a   Tottereau, O ^a   Vicente, P ^b   Falkovsky, L ^c,e   Girard, P ^d   Camassel, J ^c  

^a CRHEA CNRS   (France)

^b SAVOIE TECHNOLAC   (France)

^c UNIVERSITÉ MONTPELLIER 2   (France)

^d UNIVERSITÉ MONTPELLIER II   (France)

^e LANDAU INSTITUTE FOR THEORETICAL PHYSICS   (Russian Federation)

Author keywords

Bulk 3C SiC

Indexed keywords

COST EFFECTIVENESS; OPTIMIZATION; OPTOELECTRONIC DEVICES; SILICON WAFERS; SUBSTRATES;

DIRECT CONVERSION; WAFER CONVERSION; BULK 3C-SIC; LOW COSTS; SI WAFER; SIC MATERIALS; SIC SUBSTRATES;

SILICON CARBIDE;

EID: 4644371644     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.389-393.147     Document Type: Article

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