Feasibility of a flip-chip approach to integrate an IR filter and an IR detector in a future gas detection cell

Microsystem Technologies

Volumn 10, Issue 5, 2004, Pages 382-386

  Fonseca, L ^a   Cabruja, E ^a   Calaza, C ^b   Rubio, R ^a   Santander, J ^a   Figueras, E ^a   Gracia I ^a   Cane C ^a   Moreno, M ^b   Marco, S ^b  

^a INSTITUTO DE MICROELECTRÓNICA DE BARCELONA   (Spain)

^b UNIVERSITY OF BARCELONA   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL SENSORS; FABRY-PEROT INTERFEROMETERS; INFRARED DETECTORS; INFRARED RADIATION; LIGHT ABSORPTION; MICROMACHINING; OPTICAL FILTERS; THERMOPILES;

GAS DETECTION; INFRARED (IR) FILTERS; PLANAR STRUCTURES; THERMAL SENSORS;

FLIP CHIP DEVICES;

EID: 4644335629     PISSN: 09467076     EISSN: None     Source Type: Journal    
DOI: 10.1007/s00542-004-0420-5     Document Type: Conference Paper

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