Process diagnostics and functional correlation in surface metrology: Novel techniques, case studies and analysis system development

Measurement: Journal of the International Measurement Confederation

Volumn 36, Issue 2, 2004, Pages 175-183

  Muralikrishnan, B ^a   Raja, J ^a  

^a The University of North Carolina at Charlotte   (United States)

Author keywords

Case study; Functional correlation; Process diagnostics; Surface metrology

Indexed keywords

COMPUTATIONAL METHODS; CORRELATION METHODS; GAGES; MATRIX ALGEBRA; PROCESS ENGINEERING; TEXTURES;

CASE STUDY; FUNCTIONAL CORRELATION; PROCESS DIAGNOSTICS; SURFACE TEXTURE;

SURFACE MEASUREMENT;

EID: 4644243559     PISSN: 02632241     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.measurement.2004.05.004     Document Type: Article

References (12)

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