A novel fabrication approach for microneedles using silicon micromaching technology

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

Volumn , Issue , 2006, Pages 545-549

  Wang, Xiao ^b   Chen, Xiaoming ^b   Yu, Zhenyin ^c   Wang, Lianwei ^a,b,c  

^a IEEE

^b EAST CHINA NORMAL UNIVERSITY   (China)

^c STATE KEY LABORATORY OF TRANSDUCER TECHNOLOGY   (China)

Author keywords

Electroplating; Microfabrication; Microneedle; Nickel

Indexed keywords

CHEMOTHERAPY; DRUG DELIVERY; DRUG DOSAGE; DRUG THERAPY; ELECTROPLATING; ETCHING; METALLIZING; MOLDS; MOLECULES; NEEDLES; NEMS; NICKEL; NICKEL ALLOYS; NICKEL PLATING; OPTICAL DESIGN; PHOTORESISTS; SILICON;

(100) SILICON; (OTDR) TECHNOLOGY; (PL) PROPERTIES; ETCHING RATES; HUMAN SKIN; INTERNATIONAL CONFERENCES; MICRO-NEEDLES; MOLECULAR SYSTEMS; NICKEL ELECTROPLATING; NOVEL FABRICATION PROCESS; POTASSIUM OXIDE (KOH) ETCHING; SILICON MICRONEEDLES;

SILICON WAFERS;

EID: 46149105693     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NEMS.2006.334837     Document Type: Conference Paper

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