Polysilicon interface engineering for improved PIP capacitors

ECS Transactions

Volumn 6, Issue 3, 2007, Pages 153-166

  Towner, Janet M ^a   Naughton, John J ^a   Prasad, Jagdish ^a  

^a ON SEMICONDUCTOR   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INSULATING MATERIALS; LOW-K DIELECTRIC; NITRIDES; PLASTIC FILMS; SILICA; SILICON NITRIDE;

HIGH RELIABILITY; INTERFACE ENGINEERING; INTRINSIC OXIDES; MISSION CRITICAL; OXIDE DEPOSITION; OXIDE INTEGRITY; POLYSILICON SURFACE; PRODUCT-LINES;

POLYSILICON;

EID: 45849106155     PISSN: 19385862     EISSN: 19386737     Source Type: Conference Proceeding    
DOI: 10.1149/1.2728795     Document Type: Conference Paper

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