Effect of low energy ECR ion beam irradiation on micro nano scale mechanical properties of silicon

Applied Mechanics and Materials

Volumn 10-12, Issue , 2008, Pages 344-347

  Yao, Y X ^a   Pahlovy, Shahjada Ahmed ^a   Momota, Sadao ^b  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b KOCHI UNIVERSITY OF TECHNOLOGY   (Japan)

Author keywords

Elasticity; Fabrication; Ion beam irradiation; Mechanical properties; Nanohardness

Indexed keywords

BEARINGS (MACHINE PARTS); ELASTICITY; FABRICATION; ION BOMBARDMENT; IONS; IRRADIATION; MECHANICAL ACTUATORS; MECHANICAL PROPERTIES; MICROOPTICS; NANOHARDNESS; NANOTECHNOLOGY; VALVES (MECHANICAL);

ELASTICITY MEASUREMENT; FINISHING PROCESS; INTERCONNECTORS; ION BEAM IRRADIATION; MECHANICAL BEHAVIOR OF MATERIALS; MECHANICAL PARTS; MICRO-NANO SCALE; NANO-SCALE FABRICATION;

ION BEAMS;

EID: 45749146208     PISSN: 16609336     EISSN: 16627482     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/AMM.10-12.344     Document Type: Conference Paper

References (4)

1. Sadao momota, Y. Nojiri, Y. Hamagawa, and et al: Nuclear Instruments and Methods in Physics Research, Vol.242 (2006B), pp.247-249.
2. Sami Franssila: Introduction to micro fabrication, 2005 Edition.
3. Bernhard Wolf: Handbook of Ion Sources, 1995 Edition
4. L.C. Feldman, J.W. Mayer, S.T. Picraux: Materials Analysis by Ion Channeling (Academic Press, New York, 1982).