Novel fabrication process for the integration of MEMS devices with thick amorphous soft magnetic field concentrators

Materials Research Society Symposium Proceedings

Volumn 1052, Issue , 2008, Pages 277-282

  Brugger, Simon ^a   Pfleging, Wilhelm ^b   Paul, Oliver ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

^b KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ABLATION; AMORPHOUS SILICON; COMPOSITE MICROMECHANICS; COMPUTER NETWORKS; CONCENTRATION (PROCESS); DETECTORS; ELECTROCHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; EXCIMER LASERS; GAS LASERS; LASER ABLATION; LASER APPLICATIONS; LASERS; MAGNETIC DEVICES; MAGNETIC FIELD MEASUREMENT; MAGNETIC FIELDS; MAGNETIC FLUX; MAGNETIC MATERIALS; MAGNETIC SENSORS; MAGNETISM; MAGNETOMETERS; MECHATRONICS; MEMS; MICROMECHANICS; PAINTING; PHOTORESISTS; PIGMENTS; PULSED LASER DEPOSITION; RESINS; SENSORS; SILICON; SILICON ON INSULATOR TECHNOLOGY; TECHNOLOGY;

(OTDR) TECHNOLOGY; ELECTROSTATICALLY DRIVEN; EXCIMER; FABRICATION PROCESSES; FIELD CONCENTRATORS; HIGH SENSITIVITY (HS); IN PLANE MOTION; INTEGRATION PROCESSES; LASER SYSTEMS; MAGNETIC (CE); MAGNETIC FIELD CONCENTRATOR; MAGNETIC FLUX DENSITY (MFD); MATERIALS RESEARCH SOCIETY (MRS); MEMS DEVICES; MICRO MECHANICAL RESONATORS; MICRO-ELECTRO- MECHANICAL SYSTEM (MEMS); MICRO-PATTERNING; NARROW GAPS; NOVEL FABRICATION PROCESS; SILICON ON INSULATOR (SOI); SOFT MAGNETIC; SOFT MAGNETIC RIBBONS; STRUCTURING PROCESS; VIDEO MICROSCOPES;

MICROELECTROMECHANICAL DEVICES;

EID: 45749113343     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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