Real Time SEM Imaging of FIB Milling Processes for Extended Accuracy on TEM Samples for EFTEM Analysis

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2003-November, Issue , 2003, Pages 132-139

  Gnauck, P ^a   Zeile, U ^a   Hoffrogge, P ^a   Benner, G ^a   Orchowski, A ^a   Rau, W D ^a  

^a LEO Electron Microscopy Group   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

FAILURE ANALYSIS; ION BEAMS; MILLING (MACHINING); SPECIMEN PREPARATION;

APPLICATION EXAMPLES; ELECTRON MICROSCOPY ANALYSIS; ENERGY FILTERED TRANSMISSION ELECTRON MICROSCOPY; FOCUSED ION BEAM MILLING; MILLING PROCESS; PREPARATION TECHNIQUE; REAL- TIME; SEM IMAGING; SITE-SPECIFIC; TEM ANALYSIS;

HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY;

EID: 45749098070     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa2003p0132     Document Type: Conference Paper

References (3)

1. E. Weimer, J. P. Martin: "Development of a new ultra high performance scanning electron microscope", 13th Int. Congr. on Electron Microscopy ICEM, Vol. 1, pp. 67-68 (1994)
2. G. Auvert, "FIB Dual-Beam Sample Preparation for TEM Observation", Microscopy and Microanalysis 2003, San Antonio, TX, August 3 - 7, 2003.
3. R.F. Egerton, Electron Energy-Loss Spectroscopy in the Electron Microscope, Plenum Press, New York, 1986.