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Volumn 5640, Issue , 2005, Pages 107-116
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Advanced packaging development for very low cost uncooled IRFPA
a a a a
a
CEA GRENOBLE
(France)
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Author keywords
Microbolometer; Vacuum packaging
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Indexed keywords
AMORPHOUS SILICON;
ELECTRONICS PACKAGING;
INFRARED DETECTORS;
LIGHT ABSORPTION;
RESEARCH AND DEVELOPMENT MANAGEMENT;
THERMOMETERS;
AMORPHOUS SILICON THERMOMETERS;
MICROBOLOMETERS;
ON CHIP PACKAGING STRUCTURES;
VACUUM PACKAGING;
BOLOMETERS;
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EID: 20044369212
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.579958 Document Type: Conference Paper |
Times cited : (2)
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References (7)
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