Novel scheme of ellipsometry utilizing parallel processing with arrayed photonic crystal

Photonics and Nanostructures - Fundamentals and Applications

Volumn 2, Issue 2, 2004, Pages 149-154

  Sato, T ^a   Sasaki, Y ^b   Hashimoto, N ^c   Kawakami, S ^a,b  

^a Photonic Lattice Incorporated   (Japan)

^b TOHOKU UNIVERSITY   (Japan)

^c JAPAN SCIENCE AND TECHNOLOGY AGENCY   (Japan)

Author keywords

Autocloning; Ellipsometer; Photonic crystal; Polarizer

Indexed keywords

ARRAYS; DEPOSITION; ELLIPSOMETRY; LIGHT MODULATION; LIGHT POLARIZATION; PHOTONS; SUBSTRATES;

AUTOCLONING; ELLIPSOMETERS; PHOTONIC CRYSTALS; POLARIZERS;

CRYSTALS;

EID: 4544315460     PISSN: 15694410     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.photonics.2004.08.006     Document Type: Conference Paper

References (8)

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