3D elemental mapping using a dedicated FIB/STEM system

Microscopy and Microanalysis

Volumn 10, Issue SUPPL. 2, 2004, Pages 1030-1031

  Yaguchi, T ^a   Konno, M ^a   Kamino, T ^a   Hashimoto, T ^b   Ohnishi, T ^b   Watanabe, M ^c  

^a HITACHI LTD   (Japan)

^b HITACHI HIGH TECHNOLOGIES CORPORATION   (Japan)

^c Lehigh University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 4544286333     PISSN: 14319276     EISSN: None     Source Type: Journal    
DOI: 10.1017/S143127604881856     Document Type: Conference Paper

References (3)

1. T.Yaguchi, M.Konno, T.Kamino, T.Hashimoto, T.Ohnishi, K.Umemura and K.Asayama, Proc. Microsc. Microanal. 9 (Suppl .2) (2003) 118-119
2. T.Kamino, T.Yaguchi, Y.Kuroda, T.Hashimoto, T.Onishi, T.Ishitani, K.Umemura and K.Asayama, Proc. Microsc. Microanal. 8 (Suppl .2) (2002) 48-49
3. T.Onishi, H.Koike, T.Ishitani, S.Tomimatsu, K.Umemura and T.Kamino: Proc. 25th Int. Symp. for Testing and Failure Analysis (1999) 449-453