Experimental study of the systematic errors for a Mueller matrix double rotating compensator ellipsometer

Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 5, 2008, Pages 1027-1030

  Piller, G ^a   Broch, L ^a   Johann, L ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

COLLINS; DOUBLE ROTATING; ELLIPSOMETERS; EXPERIMENTAL STUDIES; ISOTROPIC SAMPLES; MEASUREMENT METHODS; MUELLER MATRIX; OPTICAL ELEMENTS; ZONE METHOD;

ERRORS; OPTICAL INSTRUMENTS; SPECTROSCOPIC ELLIPSOMETRY;

SYSTEMATIC ERRORS;

EID: 45249090984     PISSN: 18626351     EISSN: 16101642     Source Type: Journal    
DOI: 10.1002/pssc.200777750     Document Type: Conference Paper

References (7)

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4. R.W. Collins, in: Handbook of Ellipsometry, edited by Harland G. Tompkins and Eugene A. Irene (William Andrew Publishing & Springer-Verlag, 2005), Chap. 7.3.3, p. 546.
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7. G. Piller, Dévellopement d'un ellipsometre monochromatique temps réel a matrice de Mueller, Engineer thesis, CNAM, Paris, 2006 (in French).