Systematic errors in fixed polarizer, rotating polarizer, sample, fixed analyzer spectroscopic ellipsometry

Thin Solid Films

Volumn 313-314, Issue , 1998, Pages 73-78

  Bertucci, S ^a   Pawlowski, A ^a   Nicolas, N ^a   Johann, L ^a   El Ghemmaz, A ^a   Stein, N ^b   Kleim, R ^a  

^a UNIVERSITÉ DE LORRAINE   (France)

^b Lab d'Electrochimie des Mat   (France)

Author keywords

Ellipsometry; Rotating polarizer; Systematic errors

Indexed keywords

CALIBRATION; ERROR ANALYSIS; LIGHT POLARIZATION; MEASUREMENT ERRORS; SPECTROSCOPY;

FIXED POLARIZERS; ROTATING POLARIZERS;

ELLIPSOMETRY;

EID: 4243596341     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(97)00773-6     Document Type: Article

References (11)

1. R.W. Stobie, B. Rao, M.J. Dignam, J. Opt. Soc. Am. 65 (1975) 25.
2. D.E. Aspnes, P.S. Hauge, J. Opt. Soc. Am. 66 (1976) 949.
3. R.W. Collins, Rev. Sci. Instrum. 61 (1990) 2029.
4. R.M.A. Azzam, N.M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam, 1977.
5. Mathematica 2.1, Wolfram Research.
6. J.M.M. de Nijs, A. van Silfhout, J. Opt. Soc. Am. A5 (1988) 773.
7. R. Kleim, L. Kuntzler, A. El Ghemmaz, J. Opt. Soc. Am. A11 (1994) 2550.
8. J.M. Bennett, H.E. Bennett, in: W.G. Driscoll, W. Vaughan (Eds.), Handbook of Optics, McGraw-Hill, 1978.
9. R.M.A. Azzam, N.M. Bashara, J. Opt. Soc. Am. 61 (1971) 1380.
10. D.E. Aspnes, A.A. Studna, Appl. Opt. 14 (1975) 220.
11. D.E. Aspnes, J. Opt. Soc. Am. 64 (1974) 639.