Electrochemical etching of macropores in silicon with grooved etch seeds

Semiconductors

Volumn 42, Issue 6, 2008, Pages 746-751

  Astrova, E V ^a   Nechitailov A A ^a  

^a IOFFE INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 45249089183     PISSN: 10637826     EISSN: None     Source Type: Journal    
DOI: 10.1134/S1063782608060183     Document Type: Article

References (8)

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6. G. Barillaro, A. Nannini, and M. Piotto, Sens. Actuators A 102, 195 (2002).
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8. V. Lehmann, J. Electrochem. Soc. 140, 2836 (1993).