Technology chain for production of low-cost high aspect ratio optical structures

Recent Advances in Mechatronics

Volumn , Issue , 2007, Pages 658-662

  Krajewski, R ^a   Krezel, J ^a   Kujawinska, M ^a   Parriaux, O ^b,d   Tonchev, S ^b   Wissmann, M ^c   Hartmann, M ^c   Mohr, J ^c  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b UNIVERSITÉ JEAN MONNET   (France)

^c KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^d INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

CHARACTERIZATION TESTS; HIGH ASPECT RATIO; HOT-EMBOSSING; OPTICAL STRUCTURES; REPLICATION PROCESS; SIDE WALLS;

ASPECT RATIO;

CHAINS;

EID: 45149125128     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1007/978-3-540-73956-2_129     Document Type: Conference Paper

References (6)

1. R. Krajewski, et al.,Design, modeling and prototyping of a Microinterferometric Tomography System for optical fiber inspection", Proc.SPIE vol.6188, pp.138-148, 2006
2. J. Krel, et al. "M(O)EMS-based integrated micro-interferometric system", Proc. SPIE, vol. 6348-22, 2006
3. R. Krajewski et al. "Low-cost microinterferomtric tomograpy system for 3D refraction index distribution Measurements in optical fiber splices", Proc. SPIE vol. 5855, pp.347-351, 2005
4. M. Heckele, "Hot embossing-A flexible and successful replication technology for polymer MEMS", Proc. SPIE Vol. 5345, pp. 108-117, 2004
5. M. Heckele, et al. "Review on micro molding of thermoplastic polymers", J. Micromechanics and Microengineering, 14 R1-R14, PII:S0960-1317(04)68657-8, 2004
6. J. Kacperski, et al. "Multifunctional interferometric platform for static and dynamic MEMS measurement", Proc. SPIE vol. 5878, pp. 64-73, 2005