Multifunctional interferometric platform for static and dynamic MEMS measurement

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5878, Issue , 2005, Pages 1-10

  Kacperski, Jacek ^a   Kujawinska, Malgorzata ^a  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

Author keywords

ESPI; Liquid Crystal On Silicon (LCOS); Microelements measurement; Two beam interferometry; Wavefront corrector

Indexed keywords

INTERFEROMETERS; LIGHT MODULATION; LIQUID CRYSTALS; PHASE SHIFT; SILICON;

ESPI; LIQUID CRYSTAL ON SILICON (LCOS); TWO-BEAM INTERFEROMETRY; WAVEFRONT CORRECTOR;

MICROELECTROMECHANICAL DEVICES;

EID: 29244465901     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.616840     Document Type: Conference Paper

References (12)

1. L. Salbut, K. Patorski, M. Jozwik, J. Kacperski, C. Gorecki, A. Jacobelli, T. Dean, "Active micro-elements testing by interferometry using time-average and quasi-stroboscopic techniques", Proc. SPIE, v. 5145, p. 23-32, 2003
2. S. Petitgrand, R. Yahiaoui, A. Bosseboeuf, K. Danaie, "Quantitative time-averaged microscopic interferometry for micromechanical device vibration mode characterization", Proc. SPIE, v. 4400, p. 51-60, 2001
3. S. Petitgrand, R. Yahiaoui, K. Danaie, A. Bosseboeuf, J.P. Gilles, "3D measurement of micromechanical devices vibration mode shapes with a stroboscopic interferometric microscope", Optics and Lasers in Engineering, 36, p. 77-101, 2001
4. L. Salbut, J. Kacperski, A. Styk, M. Jozwik, H. Urey, C. Gorecki, A. Jacobelli, T. Dean, "Interferometric methods for static and dynamic characterizations of micromembranes designed for sensing functions", Proc. SPIE, \. 5458, p. 287-298, 2004
5. J. Kacperski, M. Kujawinska, X. Wang, P. J. Bos, "Active microinterferometer with liquid crystal on silicon (LCOS) for extended range static and dynamic micromembrane measurement", Proc. SPIE, v. 5532, p. 37-43, 2004
6. Mark (Xinghua) Wang, Bin Wang, "Liquid Crystal On Silicon (LCOS) spatial light modulator data sheets and technical details", Liquid Crystal Institute, Kent State University, 2003
7. K. Patorski, Z. Sienicki, M. Pawlowski, A. R. Styk, A. Jozwicka, "Studies of the properties of the temporal phase-shifting method applied to silicone microelement vibration investigations using the time-average method", Proc. SPIE, v. 5458, p. 208-219, 2004
8. D. Malacara, M. Servin, Z. Malacara, Interferogram analysis for optical testing, chapter 8, Marcel Dekker Inc., New York, 1998
9. J. Kacperski, M. Kujawinska, J. Krezel, "Modified linear and circular carrier frequency Fourier transform method applied for studies of vibrating microelements", Proc. SPIE, v. 5458, p. 287-298, 2004
10. www.smarttech.com.pl
11. H. Saito, I. Yamaguchi, T. Nakajima: "Application of holographic interferometry to mechanical experiments", Application of Holography, E.S. Barrekette ed., p. 105-126, Plenum Press, New York, 1971
12. S. Nakadate, H. Saito, T. Nakajima: "Vibration measurement using phase-shifting stroboscopic holographic interferometry"; Optica Acta, v. 33, no. 10, p. 1295-1309, 1986