Replication of micro-optical components and nano-structures for mass production

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6992, Issue , 2008, Pages

  Wissmann, M ^a   Guttmann, M ^a   Mohr, J ^a   Hartmann, M ^a   Wilson, S ^a,e   Moran Iglesias, C J ^a   Van Erps, J ^b   Krajewski, R ^c   Parriaux, O ^d   Tonchev, S ^d  

^a KARLSRUHE INSTITUTE OF TECHNOLOGY   (Germany)

^b VRIJE UNIVERSITEIT BRUSSEL   (Belgium)

^c WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^d UNIVERSITÉ JEAN MONNET   (France)

^e CRANFIELD UNIVERSITY   (United Kingdom)

Author keywords

Electroforming; Hot embossing; Injection moulding; LIGA; Mass fabrication; Microfabrication; Microstructure; Mould insert; Nanostructure; Replication

Indexed keywords

ARCHITECTURAL DESIGN; ASPECT RATIO; COMPUTER NETWORKS; DIMENSIONAL STABILITY; ELECTROCHEMISTRY; ELECTROFORMING; ELECTROMETALLURGY; FIBER OPTIC SENSORS; GEOMETRY; INJECTION (OIL WELLS); LITHOGRAPHY; MACHINE TOOLS; MICROOPTICS; MOLDING; PHOTORESISTS; PIGMENTS; PLASTIC PARTS; PLASTICS; PRODUCTION ENGINEERING; SPECIFICATIONS; TECHNOLOGY; TECHNOLOGY TRANSFER; TOOLS; WELL STIMULATION;

(OTDR) TECHNOLOGY; HIGH ASPECT RATIO (HAR); HOT EMBOSSING; INJECTION MOULDING; LIGA TECHNOLOGY; MANHATTAN; MASS FABRICATION; MASS PRODUCTION; MICRO COMPONENTS; MICRO OPTICAL COMPONENTS; MICRO-OPTICS; MOULD INSERTS; NANO-STRUCTURES; NEW PROCESSES; OPTICAL STRUCTURES; PROCESS CHAINS; SIDEWALL ROUGHNESS (SWR); STRUCTURAL GEOMETRIES; X RAY LITHOGRAPHY (XRL);

FORMING;

EID: 45149108539     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.779511     Document Type: Conference Paper

References (14)

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