Voltage Contrast like Imaging of N-Wells

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2003-November, Issue , 2003, Pages 331-337

  Boit, Christian ^a   Wirth, Kristin R ^a   Roy, Erwan Le ^b  

^a TECHNISCHE UNIVERSITÄT BERLIN   (Germany)

^b NPTest Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC GROUNDING; FAILURE ANALYSIS; VOLTAGE MEASUREMENT;

END-POINTING; VOLTAGE CONTRAST;

SILICON COMPOUNDS;

EID: 45149106323     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.31399/asm.cp.istfa2003p0331     Document Type: Conference Paper

References (14)

1. E.I. Cole Jr., "Beam-Based Localization Techniques for IC Failure Analysis", Microelectronic Failure Analysis Desk Reference 4th Ed., 133-148 (1999)
2. V.R. Rao and P. Winer, "Electrical Fault Isolation by Beam-Based Technology", Microelectronic Failure Analysis Desk Reference 4th Ed., 149-159 (1999)
3. S. Görlich, K.D. Hermann, W. Reiners and E. Kubalek, "Scanning Electron Microscopy, II" (1986)
4. J. Colvin, "A New Technique to Rapidly Identify Gate Oxide Leakage in Field Effect Semiconductors Using a Scanning Electron Microscope", Proc. ISTFA, 331-336 (1990)
5. A.N. Campbell and J.M. Soden, "Voltage Contrast in the FIB as a Failure Analysis Tool", Microelectronic Failure Analysis Desk Reference 4th Ed., 161-167 (1999)
6. C.R. Musil, J.L. Bartelt and J. Melngailis, "Focused Ion Beam Microsurgery for Electronics", IEEE Electron Device Lett., 7, 285 (1986)
7. H Ximen and CG Talbot, "Halogen-Based Selective FIB Milling for IC Probe-Point Creation and Repair", Proc. 20th ISTFA, 141-150 (1994)
8. R. Ring, R. Goruganthu and L. Stevenson, "Focused Ion Beam Applications for Flip-Chip Packaged ICs", EDFAS News, 32 (Feb. 2001)
9. W.B. Thompson, E. Le Roy, M.A. Thompson and C.-C. Tsao, "A Novel Optical End Pointing Technique Applied to Backside FIB Editing", to be published in J. Vac. Sci. Technol. B, 21 (2003)
10. R.H. Livengood, P. Winer, G. Woods and M. DiBattista, U.S. Patent US 6, 355, 494 B1
11. P. Winer and R.H. Livengood, U.S. Patent 5, 948, 217
12. M.A. Thompson, C. Richardson, E. Le Roy, T. Lundquist and W.B. Thompson, "Coaxial, Photon-Ion Technology Enables Direct Navigation to Buried Nodes on Planarized Surfaces, including Silicon", Proc. 28th ISTFA, 409-417 (2002)
13. T. Lundquist, E. Delenia, J. Harroun, E. Le Roy and C.-C. Tsao, "Ultra-Thinning of C4 Integrated Circuits for Backside Analysis during First Silicon Debug", Micro Rel., 41, 1545 (2001)
14. S.M. Sze, "Physics of Semiconductor Devices 2nd Ed.", John Wiley & Sons (1981)