Reactions of disilane with the deuterium-terminated Ge(1 0 0) 2 × 1 surface

Surface Science

Volumn 602, Issue 12, 2008, Pages 2009-2016

  Underwood, Grant ^a   Ballast, Lynette Keller ^b   Campion, Alan ^c  

^a INTEL CORPORATION   (United States)

^b Cerium Laboratories   (United States)

^c UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Disilane; Molecule solid reactions; Raman scattering spectroscopy; Semiconducting surfaces; Silicon germanium; Single crystal surfaces; Surface passivation; Thermal desorption spectroscopy

Indexed keywords

DEUTERIUM COMPOUNDS; MOLECULAR STRUCTURE; RAMAN SPECTROSCOPY; TEMPERATURE PROGRAMMED DESORPTION;

GERMANIUM MONODEUTERIDE; MOLECULAR DISILANE; SURFACE PASSIVATION;

GERMANIUM COMPOUNDS;

EID: 44949233696     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.susc.2008.03.028     Document Type: Article

References (31)

1. Iyer S.S., Patton G.L., Harame D.L., Stork J.M.C., Crabbe E.F., and Meyerson B.S. Thin Solid Films 184 (1990) 153
2. Pearsall T.P. CRC Crit. Rev. Solid State Mater. Sci. 15 (1989) 551
3. See for example: Proc. 3rd Int. Symp. on Si-MBE, Strasbourg, France. Thin Solid Films, 183 (1989).
4. Suda Y., Lubben D., Motooka T., and Greene J.E. J. Vac. Sci. Technol. B 7 (1989) 1171
5. Lubben D., Tsu R., Brambelt T.R., and Greene J.E. J. Vac. Sci. Technol. A 9 (1991) 223
6. Mahajan A., Irby J., Kinosky D., Qian R., Thomas S., Banerjee S., and Tash A. Thin Solid Films 225 (1993) 177
7. Roenigk K.F., Jenson K.F., and Carr R.W. J. Phys. Chem. 91 (1987) 5732
8. Gates S.M. Surf. Sci. 195 (1988) 207
9. Gates S.M., Greenlief C.M., Beach D.B., and Holbert P.A. J. Chem. Phys. 92 (1990) 3144
10. McCaughey M.J., and Kushner M.K. Appl. Phys. Lett. 54 (1989) 1642
11. Suto M., and Lee L.C. J. Chem. Phys. 84 (1986) 1160
12. Chatham H., Hils D., Robertson R., and Gallagher A. J. Chem. Phys. 81 (1984) 1770
13. Agrawal P.M., Thompson D.L., and Raff L.M. J. Chem. Phys. 92 (1990) 1069
14. Kulkarni S.K., Gates S.M., Scott B.A., and Sawin H.H. Surf. Sci. 239 (1990) 13
15. Kulkarni S.K., Gates S.M., Greenlief C.M., and Sawin H.H. Surf. Sci. 239 (1990) 26
16. Gates S.M., and Chiang C.M. Chem. Phys. Lett. 184 (1991) 448
17. Boland J.J. Phys. Rev. B 44 (1991) 1383
18. Campbell C.T., and Valone S.M. J. Vac. Sci. Technol. A 3 (1985) 408
19. Chamberlain J.P., Clemons J.L., Pounds A.J., and Gillis H.P. Surf. Sci. 301 (1994) 105
20. Underwood G., Ballast L.K., and Campion A. Surf. Sci. 602 (2008) 2055
21. Wu Y.M., Baker J., Hamilton P., and Nix R.M. Surf. Sci. 295 (1993) 133
22. Sano H., and Ushioda S. Phys. Rev. B: Condens. Matter 53 (1996) 1958
23. Tsu R., Lubben D., Brambelt T.R., and Greene J.E. Thin Solid Films 225 (1993) 191
24. Csik A., Langer G.A., Beke D.L., Erdelyi Z., Menyhard M., and Sulyok A. J. Appl. Phys 89 (2001) 804
25. Wu Y.M., and Nix R.M. Surf. Sci. 306 (1994) 59
26. Namiki A. Prog. Surf. Sci. 81 (2006) 337
27. Sefcik M.D., and Ring M.A. J. Organomet. Chem. 59 (1973) 167
28. Lin D.S., Miller T., and Chiang T.C. Phys. Rev. B 45 (1992) 11415
29. Jesson D.E., Pennycook S.J., and Baribeau J.-M. Phys. Rev. Lett. 66 (1991) 750
30. Li Y., Hembree G.G., and Venables J.A. Appl. Phys. Lett. 67 (1995) 276
31. Kelires P.C., and Tersoff J. Phys. Rev. Lett. 63 (1989) 1164