Phase-shifting photomask repair and repair validation procedure for transparent & opaque defects relevant for the 45nm node and beyond

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6792, Issue , 2008, Pages

  Ehrlich, Christian ^a   Buttgereit, Ute ^a   Boehm, Klaus ^a   Scheruebl, Thomas ^a   Edinger, Klaus ^a   Bret, Tristan ^a  

^a CARL ZEISS SMT AG   (Germany)

Author keywords

Aerial image simulation; Mask inspection; Mask repair; Phase; Phase shifting mask

Indexed keywords

CHARGED PARTICLES; COMPUTER NETWORKS; DEFECTS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON OPTICS; ELECTRONS; IMAGING TECHNIQUES; MAINTENANCE; MEDICAL IMAGING; MICROSCOPES; NANOTECHNOLOGY; OPTICAL SYSTEMS; PARTICLE BEAMS; PHOTOMASKS; THREE DIMENSIONAL; WELL STIMULATION;

(E ,3E) PROCESS; 45NM NODE; DOUBLE EXPOSURE; EUROPEAN; FEATURE SIZES; HIGH-SPATIAL-RESOLUTION; IMMERSION LITHOGRAPHY (IML); MASK FEATURES; OPAQUE DEFECTS; PHASE SHIFTING MASKS (PSM); PHASE-SHIFTING; PHOTOMASK REPAIR; PRODUCTION COSTS; REGION -OF-INTEREST (ROI); REPAIR SYSTEMS; SIZE AND SHAPE; THREE-DIMENSIONAL (3D) SHAPES;

REPAIR;

EID: 44949166459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.798599     Document Type: Conference Paper

References (4)

1. Peter De Bisschop, Vicky Philipsen, Robert Birkner, Ute Buttgereit, Rigo Richter, Thomas Scherübl, "Using the AIMS™ 45-193i for hyper-NA imaging applications" Proc. SPIE 6730-51
2. Ted Liang, Alan Stivers, Michael Penn, Dan Bald, Chetan Sethi, Volker Boegli et al, "Demonstration of Damage-free Mask Repair Using Electron Beam-induced Processes", Proc. SPIE, Vol.5446, pp.291-300, 2004.
3. Klaus Edinger, Hans Becht, Rainer Becker, Volker Bert, Volker Boegli, Michael Budach et al., "A Novel Electron Beam-based Photomask Repair Tool", Proc. SPIE, Vol.5256, pp. 1222-1231, 2003.
4. Sascha Perlitz, Ute Buttgereit, Thomas Scherübl, "PHAME: a novel phase metrology tool of Carl Zeiss for in-die phase measurement under scanner relevant optical settings", Proc.SPIE, Vol.6518, 2007.