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Volumn 45, Issue 3, 2008, Pages 368-375

Determination of pumping speed and its impact on the overall uncertainty budget of the CMI orifice flow standard

Author keywords

[No Author keywords available]

Indexed keywords

BUDGET CONTROL; CALIBRATION; DROP BREAKUP; GAGES; LEAD; MEASUREMENTS; MICROFLUIDICS; ORIFICES; PUMPS; SPEED; THICKNESS MEASUREMENT;

EID: 44949086548     PISSN: 00261394     EISSN: 16817575     Source Type: Journal    
DOI: 10.1088/0026-1394/45/3/015     Document Type: Article
Times cited : (5)

References (13)
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    • The calibration of vacuum gauges
    • Poulter K F 1977 The calibration of vacuum gauges J. Phys. E: Sci. Instrum. 10 112-25
    • (1977) J. Phys. E: Sci. Instrum. , vol.10 , Issue.2 , pp. 112-125
    • Poulter, K.F.1
  • 2
    • 0001262339 scopus 로고
    • The National Bureau of Standards primary high-vacuum standard
    • Tilford C R, Dittmann S and McCulloh K E 1988 The National Bureau of Standards primary high-vacuum standard J. Vac. Sci. Technol. A 6 2853-9
    • (1988) J. Vac. Sci. Technol. , vol.6 , Issue.5 , pp. 2853-2859
    • Tilford, C.R.1    Dittmann, S.2    McCulloh, K.E.3
  • 3
    • 0035439973 scopus 로고    scopus 로고
    • Affect on pumping-speed measurement due to variations of test dome design based on Monte Carlo analysis
    • Nesterov S B, Vassiliev Y K and Longsworth R C 2001 Affect on pumping-speed measurement due to variations of test dome design based on Monte Carlo analysis J. Vac. Sci. Technol. A 19 2287-93
    • (2001) J. Vac. Sci. Technol. , vol.19 , Issue.5 , pp. 2287-2293
    • Nesterov, S.B.1    Vassiliev, Y.K.2    Longsworth, R.C.3
  • 4
    • 21144468935 scopus 로고
    • Design and evaluation of a primary high-vacuum standard
    • Jitschin W, Jousten K and Wandrey D 1992 Design and evaluation of a primary high-vacuum standard J. Vac. Sci. Technol. A 10 3344-51
    • (1992) J. Vac. Sci. Technol. , vol.10 , Issue.5 , pp. 3344-3351
    • Jitschin, W.1    Jousten, K.2    Wandrey, D.3
  • 5
    • 0003023932 scopus 로고
    • Recommended procedure for measuring pumping speed
    • Hablanian M H 1987 Recommended procedure for measuring pumping speed J. Vac. Sci. Technol. A 5 2552-7 ISO 21360
    • (1987) J. Vac. Sci. Technol. , vol.5 , Issue.4 , pp. 2552-2557
    • Hablanian, M.H.1
  • 7
    • 0025601061 scopus 로고
    • Procedures for measuring pumping speeds
    • Grosse G, Jitschin W and Wandrey D 1990 Procedures for measuring pumping speeds Vacuum 41 2120-2
    • (1990) Vacuum , vol.41 , Issue.7-9 , pp. 2120-2122
    • Grosse, G.1    Jitschin, W.2    Wandrey, D.3
  • 8
    • 8344275927 scopus 로고    scopus 로고
    • Uncertainty analysis of the high vacuum part of the orifice-flow-type pressure standard
    • Peksa L, epa P, Gronych T, Tesa J and Prak D 2004 Uncertainty analysis of the high vacuum part of the orifice-flow-type pressure standard Vacuum 76 477-89
    • (2004) Vacuum , vol.76 , Issue.4 , pp. 477-489
    • Peksa, L.1    Epa, P.2    Gronych, T.3    Tesa, J.4    Prak, D.5
  • 10
    • 8644251279 scopus 로고    scopus 로고
    • Numerical simulation of rarefied gas flow through a thin orifice
    • Sharipov F 2004 Numerical simulation of rarefied gas flow through a thin orifice J. Fluid Mech. 518 35-60
    • (2004) J. Fluid Mech. , vol.518 , pp. 35-60
    • Sharipov, F.1
  • 12
    • 44949108168 scopus 로고    scopus 로고
    • 112 N 83 Standard methods for calibration 1, Registered as ISO/DIS 3570/1
    • -5 Pa Registered as ISO/DIS 3570/1
    • -5 Pa


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.