Inherently robust micromachined gyroscopes with 2-DOF sense-mode oscillator

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 664-667

  Acar, Cenk ^a   Shkel, Andrei M ^b   Costlow, Lynn ^a   Madni, Asad M ^c  

^a Systron Donner Automotive   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c BEI Technologies Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MICROMACHINED GYROSCOPE; RESONANT PEAKS; SENSE MODE OSCILLATORS; STRUCTURAL PARAMETER;

DEGREES OF FREEDOM (MECHANICS); FREQUENCY RESPONSE; MICROMACHINING; PARAMETRIC OSCILLATORS; ROBUSTNESS (CONTROL SYSTEMS); SENSITIVITY ANALYSIS;

GYROSCOPES;

EID: 33845562747     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597786     Document Type: Conference Paper

References (5)

1. H. Xie and G. K. Fedder. "Integrated Microelectromechanical Gyroscopes". Journal of Aerospace Engineering, Vol. 16, No. 2, April 2003, pp. 65-75.
2. S. Park and R. Horowitz. Adaptive Control for Z-Axis MEMS Gyroscopes. American Control Conference, Arlington, VA, June 2001.
3. R.P. Leland. Adaptive Tuning for Vibrational Gyroscopes. Proceedings of IEEE Conference on Decision and Control, Orlando, FL, Dec. 2001.
4. C. Acar. Robust Micromachined Vibratory Gyroscopes. Ph.D. Thesis, University of California Irvine, 2004.
5. J.A. Geen. A Path to Low Cost Gyroscopy. Solid-State Sensor and Actuator Workshop, Hilton Head, SC, 1998, pp. 51-54.