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Volumn 3 PART A, Issue , 2008, Pages 593-601
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Accelerating development of a MEMS piezoelectric microphone
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Author keywords
[No Author keywords available]
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Indexed keywords
(E ,2E) THEORY;
(OTDR) TECHNOLOGY;
ALUMINUM NITRIDE (AIN TIN);
APPLIED (CO);
BAND PASS FILTERS (BPF);
BEST FIT;
CASE STUDIES;
COMBINED EFFECTS;
CONCURRENT DESIGN;
DESIGN CONCEPTS;
DESIGN METHODOLOGIES;
DESIGN THEORY AND METHODOLOGY;
DESIGN VARIATIONS;
DEVELOPMENT PROCESSES;
DEVELOPMENT PROGRAMS;
FAST PATH;
FAST PROTOTYPING;
FILM BULK ACOUSTIC RESONATOR (FBAR);
FINITE ELEMENT (FE) MODELING;
INTERNATIONAL CONFERENCES;
INTERNATIONAL DESIGNS;
MEAS URED RESULTS;
MICRO AND NANO SYSTEMS;
PHASE I;
PHASE II;
PIEZOELECTRIC FILMS;
PIEZOELECTRIC MEMS;
POTENTIAL APPLICATIONS;
PROCESS TECHNOLOGIES;
PRODUCT SPECIFICATIONS;
PRODUCTION PROCESSES;
PROTOTYPING;
QUALITY FUNCTION DEPLOYMENT (QFD);
RAPID DEVELOPMENT;
SECOND PHASE;
TECHNICAL CONFERENCES;
VOICE OF THE CUSTOMER;
VOLUME PRODUCTIONS;
ACOUSTIC EQUIPMENT;
ACOUSTIC RESONATORS;
ACOUSTIC SURFACE WAVE FILTERS;
ALUMINUM;
ALUMINUM COMPOUNDS;
ARCHITECTURAL DESIGN;
AUTOMOTIVE INDUSTRY;
COMPOSITE MICROMECHANICS;
COMPUTER NETWORKS;
COMPUTERS;
CONCURRENT ENGINEERING;
CUBIC BORON NITRIDE;
CUSTOMER SATISFACTION;
DESIGN;
ELECTROCHEMICAL SENSORS;
ENGINEERING;
ENGINEERING EDUCATION;
FINITE DIFFERENCE METHOD;
FINITE ELEMENT METHOD;
INDUSTRY;
INFORMATION SYSTEMS;
LIGHT METALS;
MARKETING;
MEMS;
MICROELECTROMECHANICAL DEVICES;
MICROFLUIDICS;
MICROPHONES;
MICROSENSORS;
NANOSYSTEMS;
NITRIDES;
PHOTOACOUSTIC EFFECT;
PIEZOELECTRICITY;
PROCESS ENGINEERING;
PRODUCT DESIGN;
PRODUCT DEVELOPMENT;
QUALITY FUNCTION DEPLOYMENT;
SPECIFICATIONS;
TECHNOLOGY;
WELL STIMULATION;
PROCESS DESIGN;
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EID: 44849114575
PISSN: None
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1115/DETC2007-34958 Document Type: Conference Paper |
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Times cited : (5)
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References (18)
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