Ion beam modification of structural and electrical properties of TiN thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 10, 2008, Pages 2507-2510

  Popovic M ^a   Stojanovic M ^a   Perusko D ^a   Novakovic M ^a   Radovic I ^a   Milinovic V ^a,b   Timotijevic B ^a   Mitric M ^a   Milosavljevic M ^a  

^a UNIVERSITY OF BELGRADE   (Serbia)

^b UNIVERSITY OF GÖTTINGEN   (Germany)

Author keywords

Hard coatings; Ion beam modification; RBS; TEM; TiN

Indexed keywords

ARGON; ELECTRIC PROPERTIES; ION BEAMS; TITANIUM NITRIDE;

ION BEAM MODIFICATION; TIN THIN FILMS;

THIN FILMS;

EID: 44649108220     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.032     Document Type: Article

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