Effect of ion irradiation on the stability of amorphous Ge2Sb2Te5 thin films

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 266, Issue 10, 2008, Pages 2511-2514

  De Bastiani, R ^a   Piro, A M ^a   Crupi, I ^a   Grimaldi, M G ^a   Rimini, E ^a,b  

^a UNIVERSITY OF CATANIA   (Italy)

^b CNR   (Italy)

Author keywords

Chalcogenides; Defects; Ion irradiation; RBS; Reflectivity; Stability

Indexed keywords

AMORPHOUS FILMS; CRYSTALLIZATION KINETICS; FREE ENERGY; ION BOMBARDMENT; PHASE CHANGE MEMORY; SEMICONDUCTING GERMANIUM COMPOUNDS; THERMODYNAMIC STABILITY;

DAMAGE ACCUMULATION; ION BEAM IRRADIATION; TIME RESOLVED REFLECTIVITY (TRR);

THIN FILMS;

EID: 44449090890     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2008.03.037     Document Type: Article

References (10)

1. Lankhorst M.H.R., Ketelaars B.W.S.S., and Wolters R.A.M. Nat. Mater. 4 (2005) 347
2. Wutting M. Nat. Mater. 4 (2005) 265
3. Kolobov A., Fons P., Frenkel A.I., Ankundinov A.L., Tominaga J., and Uruga T. Nat. Mater. 3 (2004) 703
4. Welnic W., Pamungkas A., Detemple R., Steimer C., Blugel S., and Wuttig M. Nat. Mater. 5 (2006) 56
5. Ziegler J.F., Biresack J.P., and Littmark U. The Stopping and the Range of Ions in Solids (1985), Pergamon, New York
6. Mayer M. AIP Conf. Proc. 475 (1999) 541
7. Yamada N., and Matsunaga T. J. Appl. Phys. 88 (2000) 7020
8. Olson G.L., and Roth J.A. Handbook of Crystal Growth Vol. 3 (1994), Elsevier, Amsterdam 274
9. Spinella C., Lombardo S., and Priolo F. J. Appl. Phys. 84 (1998) 5383 and references therein
10. Matsunaga T., and Yamada N. Jpn. J. Appl. Phys. 41 (2002) 1674