Choice and fabrication of micro spectrometer components

Proceedings of the World Congress on Intelligent Control and Automation (WCICA)

Volumn 5, Issue , 2004, Pages 3850-3852

  Zhang, Chengmei ^a   Mei, Tao ^a   Kong, Deyi ^a  

^a INSTITUTE OF INTELLIGENT MACHINES   (China)

Author keywords

Detector; Dispersive element; Microspectrometers; Optical path

Indexed keywords

DISPERSIVE ELEMENT; FABRY-PEROT INTERFEROMETER; MICROSPECTROMETERS; OPTICAL PATH;

AUTOMATION; CHARGE COUPLED DEVICES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROOPTICS; OPTICAL COLLIMATORS; REACTIVE ION ETCHING; SPECTROPHOTOMETERS;

INTELLIGENT CONTROL;

EID: 4444382420     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (12)

1. S.H. Kong, D.D.L. Wijngaards and R.F. Wolffenbuttel, "Infrared mico-spectrometer based on a diffraction grating," Sensors and Actuators A, 92(2001), pp. 88-95.
2. Gaylin M.Yee, Nadim I.Maluf, Paul A.Hing, Michael Albin and Gregory T.A.Kovacs, "Miniature spectrometers for biochemical analysis," Sensors and Actuators A, 58(1997), pp.61-66.
3. Ping Xu, Xiaochun Zhang, Lurong Guo and Yongkang Guo, "Theoretical Analysis on N-step Blazed Grating," College Physics, Vol. 15 No.4, April 1996.
4. Xun Wang and Bingquan Sun, "Analysis and Calculation about Diffraction Efficiency of Binary Optics Elements," Journal of Fushun Petroleum Institute, Vol. 21 No.4, December 2001.
5. Xin Tan and Bizhen Dong., "Fabrication and Applications of Diffracted Optical Devices," Physics, May 1994.
6. Junfeng Shi, Mei Hui, Dong-sheng Wang and Wenwei Mao, "Micromation and Applications of Spectrometers," Optical Technique, Vol. 29 No.1, January 2003.
7. Manuscript by Xiao chen, "Microlens Grating for Miniature Spectrometer", Laser & Optoelectronics Progress, August 1999.
8. st ed., 1984.
9. Zhengyi Xu, Bin Xiong, Yi Wang and Yuelin Wang. "Micromachined Infrared Thermopile Detector Array," Piezoelectronics & Acoustooptics, 2001 (supplement).
10. T.A. Kwa and R.F. Wolffenbuttel, "Integrated rating/detector array fabricated in silicon using micromachining techniques," Sensors and Actuators A, 31(1992), pp. 259-266.
11. Zavracky PM and Hennenberg E. A, "New process for the fabrication of miniature Fabry-Perot spectrometers," Mechatronics, pp.485-504, August 1998.
12. LAHIJI GR and WISE KD, "A batch-fabricated silicon thermopile infrared detector[J]", IEEE Tansaction on Electron Devices, 1986,Ed-33(1).