Dot array microoptics for lighting panel using synchrotron radiation lithography

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 43, Issue 6 B, 2004, Pages 3872-3876

  Utsumi, Yuichi ^a   Minamitani, Megumi ^b   Hattori, Tadashi ^a  

^a UNIVERSITY OF HYOGO   (Japan)

^b Fujipuream Corporation   (Japan)

Author keywords

LIGA; Lighting panel; Liquid crystal display; Micro optics; Microfabrication; Personal digital assistance; Synchrotron radiation

Indexed keywords

LIGHTING PANNEL; LUMINOSITY; MICROFABRICATIONS; PERSONAL DIGITAL ASSISTANTS (PDA);

CAMERAS; CHARGE COUPLED DEVICES; COMPUTER SIMULATION; ELECTRIC POWER UTILIZATION; LIGHT EMITTING DIODES; LIGHT SOURCES; LIQUID CRYSTAL DISPLAYS; MICROSTRUCTURE; SYNCHROTRON RADIATION; X RAY LITHOGRAPHY;

MICROOPTICS;

EID: 4444229058     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.43.3872     Document Type: Conference Paper

References (2)

1. A. Ando, S. Amano, S. Hashimoto, H. Kinoshita, S. Miyamoto, T. Mochizuki, M. Niibe, Y. Shoji, M. Terasawa, T. Watanabe and N. Kumagai: J. Synchrotron Rad. 5 (1998) 342.
2. T. Hattori, H. Mekaru and Y. Utsumi: Rev. Sci. Instrum. 73 (2002) 1376.